Electron irradiation of power
semiconductors
Precise modification of properties through the use of electron radiation
Power semiconductors are key components in power electronics that are used in a wide range of applications, from energy distribution to industrial drives. Electron irradiation (E-Beam) is used to optimally adapt the switching and conduction behavior of these semiconductor components to the respective requirements: a proven process that specifically controls the service life of the charge carriers by generating recombination centers.
Examples of semiconductor components that are frequently subjected to electron irradiation:
These components benefit from improved switching properties, reduced losses and an extended service life.
Compared to other methods, such as diffusion (e.g. platinum, gold or palladium diffusion), treatment with electron radiation offers a number of advantages:
This means that there is no change in the chemical composition of the semiconductor material. This prevents precipitation or agglomeration of heavy metals and enables very fine control of switching times and junction capacitance.
Electron irradiation takes place at comparatively low temperatures, which reduces the thermal load on the semiconductor and preserves the integrity of the crystal lattice. A temperature of less than 270°C is required to stabilize the defects created.
By adjusting the electron fluence and irradiation energy, electron irradiation enables flexible design of the defects. The process therefore produces a reproducible, homogeneous minority carrier lifetime and is less susceptible to process fluctuations.
Electron irradiation generates a lower leakage current in the blocking state. By selecting the annealing temperature and irradiation dose, the ratio of double sites and oxygen/vacancy complexes can be specifically adjusted and the properties of the recombination centers optimized.
With stacked irradiation, we at BGS not only optimize individual power semiconductors, but also several at the same time – for maximum efficiency. In this process, numerous power semiconductors are stacked on top of each other and simultaneously exposed to the electron radiation. This method enables more efficient processing of large quantities, as many semiconductors can be irradiated at the same time, which significantly shortens the process time.
The use of high-energy electron radiation (in the range of several MeV) ensures sufficient penetration depth to ensure homogeneous irradiation of all power semiconductors and to obtain the desired defect concentration.
They enable large currents and voltages to be switched quickly and efficiently. This is crucial for the control and stability of modern power distribution systems.
Modified diodes and thyristors increase the energy efficiency and service life of motor controllers. These components enable precise control in high-performance motors, especially in applications such as robotics and production automation.
Modified MOSFETs and IGBTs increase efficiency and reliability in electric drives and power electronics, especially under extreme conditions such as high temperatures and heavy loads.
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Efficient processing of large quantities of power semiconductors
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